kw.\*:("electron beam drawing")
Results 1 to 2 of 2
Selection :
The Possibility of Planar Periodic Domain Structures Engineering on the Y-Cut Surfaces of LiTaO3 Crystals by E-Beam Point WritingKOKHANCHIK, L. S; PUNEGOV, D. V.Ferroelectrics (Print). 2008, Vol 373, pp 69-76, issn 0015-0193, 8 p.Conference Paper
Ordering of 6-nm-sized nanodot arrays with 10-nm-pitch using self-assembled block copolymers along electron beam-drawn guide-linesHOSAKA, Sumio; AKAHANE, Takashi; HUDA, Miftakhul et al.Microelectronic engineering. 2014, Vol 123, pp 54-57, issn 0167-9317, 4 p.Conference Paper